Inficon INF-350-065 PSG500 Vacuum Gauge

SKU: INF-350-065
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PSG500 4-VCR (1/4″).

Description

The INFICON Pirani Standard Gauges, PSG500 and PSG502-S, PSG510-S and PSG512-S employ the most advanced digital Pirani technology available in the marketplace. The rugged stainless steel sensor cell and compact design qualify them for use on semiconductor systems and for standard applications, such as fore vacuum lines.

FEATURES:

  • 1:1 compatible to TTR 91 and TTR 96 Pirani Transmitter Series
  • Easy push button ATM and HV adjustment
  • Space-saving rugged design
  • Aluminium housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance.

APPLICATIONS:

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range.

INCLUDES:
1 x Inficon 350-065 PSG500 Vacuum Gauge, 1 x English manual and 12-month warranty.

SPECIFICATIONS:

Type PSG500 tungsten PSG500-S tungsten, setpoints PSG502-S nickel, setpoints
Measuring principle thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani
Accuracy(N2)
1 x 10-3 … 100 mbar % of reading ±15%
5 x 10-4 … 1 x 10-3 mbar % of reading ±50%
100 … 1000 mbar % of reading ±50%
Repeatability (air)
1 x 10-3 … 100 mbar % of reading 2% 2% 2%
Output signal (measurement signal)
Voltage range V 0 … +10.3 0 … +10.3 0 … +10.3
Measurement range V +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0
Measurement range (air, 02, CO, N2) mbar 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000
Setpoint
Setting range mbar 2 x 10-3 … 500 2 x 10-3 … 500
Number of setpoints Number of setpoints none 2 2
Hysteresis % of reading 10% above lower threshold 10% above lower threshold
Relay contact 30 30
Relay contact: Switching time ms <20 <20
Supply voltage
At gauge V (dc) +14 …+30 +14 …+30 +14 …+30
Ripple V (p-p) ≤1 ≤1 ≤1
Voltage vs. pressure logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade
Internal volume
DN 16 ISO-KF, DN 16 CF-R, 7/16-20 UNF cm³ (in.³) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R long tube cm³ (in.³) 10 (0.61) 10 (0.61) 10 (0.61)
1/8” NPT , 4 VCR, 8 VCR, 1/2” tube cm³ (in.³) 2 (0.122) 2 (0.122) 2 (0.122)
Admissible temperature
Operation °C +5 … +60 +5 … +60 +5 … +60
Vacuum connection (1) °C 80 / 250 (2) 80 / 250 (2) 80 / 250 (2)
Storage °C -20 … +65 -20 … +65 -20 … +65
Weight
DN 16 ISO-KF, 7/16-20 UNF g 80 80 80
DN 16 CF-R, 4 VCR g 100 100 100
1/8” NPT, 1/2” tube g 70 70 70
8 VCR, DN 16 ISO-KF long tube g 130 130 130
DN 16 CF-R long tube g 140 140 140
Error signal V 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture)
Output impedance 2 x 4.7 2 x 4.7 2 x 4.7
Minimum loaded impedance kΩ 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof
Response time ms 80 80 80
Gauge identification kΩ 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common
Adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment
Current consumption mA <500 (max. starting current) <500 (max. starting current) <500 (max. starting current)
Power consumption W ≤1 ≤1 ≤1
Electrical connection FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male
Sensor cable 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding
Cable length m ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2)
Materials exposed to vacuum glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
Filament W W Ni
Admissible pressure bar (absolute) 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases
Mounting orientation any any any
Degree of protection IP40 IP40 IP40

 

Documents

Inficon 350-065 PSG500 Vacuum Gauge English Manual

Inficon 350-065 PSG500 Vacuum Gauge Data Sheet